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更新時間:2022-10-08 13:44:27瀏覽次數(shù):325次
聯(lián)系我時,請告知來自 環(huán)保在線HORIBAMFC氣體流量控制器N2流量計SEC-N112深圳市天鉉真空技術(shù)有限公司供應(yīng)美國真空計流量計真空泵分子泵激光器INFICON皮拉尼PSG500、PSG502-S、PSG510-S和PSG512-S型標準真空計采用當今市場上的數(shù)字皮拉尼技術(shù)
INFICON 皮拉尼PSG500、PSG502-S、PSG510-S 和 PSG512-S型標準真空計采用當今市場上的數(shù)字皮拉尼技術(shù)。 不銹鋼傳感器單元堅固耐用,結(jié)構(gòu)設(shè)計緊湊,適用于半導(dǎo)體系統(tǒng)和標準應(yīng)用,例如前級真空管。
益處
類型
PSG500 tungsten | PSG500-S tungsten, setpoints | PSG502-S nickel, setpoints | PSG510-S tungsten, setpoints, ceramic feedthroughs | PSG512-S nickel, setpoints, ceramic feedthroughs | ||
測量原則 | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani | thermal conductance according to Pirani | |
精度 (N2) | ||||||
1 x 10-3… 100 毫巴 | % of reading | ±15% | ±15% | ±15% | ±15% | ±15% |
5 x 10-4… 1 x 10-3 毫巴 | % of reading | ±50% | ±50% | ±50% | ±50% | ±50% |
100 … 1000 毫巴 | % of reading | ±50% | ±50% | ±50% | ±50% | ±50% |
可重復(fù)性(空氣) | ||||||
1 x 10-3… 100 毫巴 | % of reading | 2% | 2% | 2% | 2% | 2% |
輸出信號(測量信號) | ||||||
電壓范圍 | V | 0 … +10.3 | 0 … +10.3 | 0 … +10.3 | 0 … +10.3 | 0 … +10.3 |
測量范圍 | V | +1.9 … +10.0 | +1.9 … +10.0 | +1.9 … +10.0 | +1.9 … +10.0 | +1.9 … +10.0 |
測量范圍(空氣、O2、CO、N2) | mbar | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 | 5 x 10-4 to 1000 |
設(shè)定點 | ||||||
設(shè)定點數(shù)量 | 2 | 2 | 2 | 2 | ||
設(shè)置范圍 | mbar | ? | 2 x 10-3 … 500 | 2 x 10-3 … 500 | 2 x 10-3 … 500 | 2 x 10-3 … 500 |
滯后 | % of reading | ? | 10% above lower threshold | 10% above lower threshold | 10% above lower threshold | 10% above lower threshold |
繼電器觸點 | V (dc) A (dc) | ? | 30 | 30 | 30 | 30 |
繼電器觸點: 轉(zhuǎn)換時間 | ms | ? | <20 | <20 | <20 | <20 |
電源電壓 | ||||||
真空計上 | V (dc) | +14 …+30 | +14 …+30 | +14 …+30 | +14 …+30 | +14 …+30 |
波紋 | V (p-p) | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
電壓與壓強 | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | logarithmic 1.286 Volts per decade | |
內(nèi)部容積 | ||||||
DN 16 ISO-KF,DN 16 CF-R,7/16-20 UNF | cm3 (in.3) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) | 1.5 (0.092) |
DN 16 ISO-KF & DN 16 CF-R 長管 | cm3 (in.3) | 10 (0.61) | 10 (0.61) | 10 (0.61) | 10 (0.61) | 10 (0.61) |
1/8'' NPT,4 VCR,8 VCR,1/2'' 管 | cm3 (in.3) | 2 (0.122) | 2 (0.122) | 2 (0.122) | 2 (0.122) | 2 (0.122) |
容許溫度 | ||||||
運行 | °C | +5 … +60 | +5 … +60 | +5 … +60 | +5 … +60 | +5 … +60 |
真空連接 (1) | °C | 80 / 250 (2) | 80 / 250 (2) | 80 / 250 (2) | 80 / 250 (2) | 80 / 250 (2) |
貯存 | °C | -20 … +65 | -20 … +65 | -20 … +65 | -20 … +65 | -20 … +65 |
重量 | ||||||
DN 16 ISO-KF,7/16-20 UNF | g | 80 | 80 | 80 | 80 | 80 |
DN 16 CF-R,4 VCR | g | 100 | 100 | 100 | 100 | 100 |
1/8'' NPT,1/2'' 管 | g | 70 | 70 | 70 | 70 | 70 |
8 VCR,DN 16 ISO-KF 長管 | g | 130 | 130 | 130 | 130 | 130 |
DN 16 CF-R 長管 | g | 140 | 140 | 140 | 140 | 140 |
錯誤信號 | V | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) | 0 … +0.5 (filament rupture) |
輸出電阻 | ? | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 | 2 x 4.7 |
*小負載電阻 | k? | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof | 10, short-circuit proof |
反應(yīng)時間 | ms | 80 | 80 | 80 | 80 | 80 |
真空計識別 | k? | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common | 27.0, referenced to supply common |
調(diào)整 | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment | one tactile switch for ATM and HV adjustment | |
電流消耗 | mA | <500 (max. starting current) | <500 (max. starting current) | <500 (max. starting current) | <500 (max. starting current) | <500 (max. starting current) |
功耗 | W | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
電氣連接 | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | FCC 68 / RJ45 appliance connector, 8 poles, male | |
傳感器電纜 | 8 poles plus shielding | 8 poles plus shielding | 8 poles plus shielding | 8 poles plus shielding | 8 poles plus shielding | |
電纜長度 | m | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) | ≤100 (8 x 0.14 mm2) |
暴露于真空的材料 | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 | |
單絲 | W | W | Ni | W | Ni | |
容許壓力 | bar (absolute) | 10, limited to inert gases | 10, limited to inert gases | 10, limited to inert gases | 10, limited to inert gases | 10, limited to inert gases |
安裝定位 | any | any | any | any | any | |
保護等級 | IP40 | IP40 | IP40 | IP40 | IP40 |
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