GFC系列高性能全自動(dòng)真空鍍膜機(jī) Series GFC High Quality Vacuum Thin Film Coater 技術(shù)參數(shù) Technical parameters
真空室體 Vacuum chamber
Ø1300*1450mm,SUS304材質(zhì) φ1,300*1,450mm,SUS304 material
排氣系統(tǒng) Air exhaust system
KT-500擴(kuò)散泵2臺(tái),總排氣速率(加載水冷阱)11,000Pa.L/S Two sets of KT-500 diffusion pump, with a gross exhaust velocity (loaded with water-cooling trap) of 11,000Pa.L/S;
極限真空≤2.0E-4Pa;排氣時(shí)間≤15min(大氣→4.0E-3Pa) Ultimate vacuum ≤2.0E-4Pa; exhaust time ≤15min (atmosphere→4.0E-3Pa)
基片架 Substrate holder
Ø1200四葉扇形基片架, 3~30rpm轉(zhuǎn)速;可選配行星基片架、翻轉(zhuǎn)機(jī)構(gòu)等 φ1200 four-blade sector-shaped substrate holder, rotating speed 3~30rpm; a planet substrate holder or a turnover mechanism can also be matched;
加熱機(jī)構(gòu) Heating means
******350℃,PID控制;恒溫20min后溫度均勻性250±10℃ Maximum 350℃, PID control; temperature homogeneity being 250±10℃ after 20 min of constant temperature control;
石英監(jiān)控儀 Quartz monitor
進(jìn)口石英晶體膜厚監(jiān)控儀;2點(diǎn)(或6點(diǎn))晶振探頭 Imported quartz crystal monitor on film depth, with two-point (or six-point) crystal probe;
電子束蒸發(fā)源 Electron beam evaporation source
10KW電子槍 2臺(tái),12點(diǎn)坩堝和環(huán)形坩堝 Two sets of 10KW electron gun, 12-point crucible or ring-shaped crucible;
電阻蒸發(fā)源 Resistance evaporation source
功率4KW(一對(duì)、兩對(duì)或多對(duì)) Power of 4KW (one pair, two pairs or more pairs)
膜厚修正板 Film depth correction board
2個(gè)自動(dòng)可倒式膜厚修正機(jī)構(gòu) Two automatic film depth correction mechanisms of collapsible type
反應(yīng)氣體 Reaction gas
APC自動(dòng)壓強(qiáng)控制儀,質(zhì)量流量計(jì) APC automatic pressure controller, mass flowmeter
離子源 Ion source
可選配Kafman、Holl或RF離子源 Available for matching of Kafman, Holl or RF ion source
低溫抽氣裝置 Low temperature evacuating equipment
進(jìn)口低溫抽氣裝置有效捕集水蒸汽,******溫度-130℃ The imported low-temperature evacuating equipment can effectively gather water vapor; minimum temperature -130℃
RCS系統(tǒng) RCS system
基于WINDOWS的全自動(dòng)鍍膜軟件 Windows-based full automatic coating software
控制系統(tǒng) Control system
控制柜(液晶觸摸式彩色顯示器),遠(yuǎn)程控制遙控盒 Control cabinet (with liquid crystal color touch screen), remote-control box for remote control